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E2600 Filter Housing

Advanced protection for optics and resists
Data Sheet (408761)
 
E2600 Filter Housing
  • Hybrid media chemical air filters remove a full range of contaminants including acids, bases and condensable organics
  • Internal HEPA filters ensure particle control
  • Interstack sample ports allow filter performance monitoring, breakthrough-warming and intelligent filter change out planning
  • Small footprint saves cleanroom space
  • Rigid construction ensures reliable, trouble-free operation
  • Chemically clean construction materials ensure contamination-free air to the process tool
  • Dual inlet and outlet transitions for simple, hard or flexible duct connection to process tool air handling systems