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Planarcap® LPX Disposable Filters

Point-of-use disposable filters for silica and alumina abrasives for oxide and copper CMP
Data Sheet (396214)
 
Planarcap® LPX Disposable Filters
  • Designed for use with silica and alumina slurry solutions – most typically used in copper, ILD, STI and tungsten CMP applications
  • Available in a wide range of retention ratings from 1 µm to 5 µm
  • Meets the needs of point-of-use CMP slurry filtration applications
  • Available as a disposable filters with Flaretek® fittings
  • All-polypropylene construction with pleated filtration media
 
Planarcap® LPX Disposable Filters
Materials:
 Medium: Pleated depth polypropylene

Core, cage and shell: Polypropylene
Connections:
 Inlet/outlet: 3/8” or 1/4” Flaretek® fitting

Vent/drain: 1/4” Flaretek® fitting*
Maximum operating conditions:
 Maximum operating pressure: 0.27 MPa (2.7 bar, 40 PSI) at 25°C

Maximum forward/reverse differential pressure 0.27 MPa (2.7 bar, 40 PSID) at 20°C

Maximum operating temperature: 40°C (104°F)
Notes:
 *Part number SKNP 010L2F is available with 1/8” MNPT vent/drain

Ordering Information

Part Number Description Membrane/
Media/M.O.C.* 		Retention Rating Connection Size O-Ring
PCA103LF1 PLanarcap LPX CMP Filter Polypropylene 1.00 Flaretek®
SKNP010L2F PLanarcap LPX CMP Filter Polypropylene Flaretek®
PCA203LF1 PLanarcap LPX CMP Filter Polypropylene Flaretek®
PCA303LF1 PLanarcap LPX CMP Filter Polypropylene Flaretek®
PCA503LF1 PLanarcap LPX CMP Filter Polypropylene Flaretek®

How to Order From Entegris