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Planarcap® TPX Disposable Filters

Point-of-use disposable filters for ceria and other smaller abrasive particles at low concentrations
Datasheet (349050)
 
Planarcap® TPX Disposable Filters
  • Pleat design provides customers with superior lifetime and flow
  • Provides a reduction in micro-scratches and total defects
  • Planarcap® TPX Series is specially designed for Ceria and colloidal slurries
  • Optimized to remove defect causing particles while maintaining a low pressure drop and higher lifetime over existing products
 
Planarcap® TPX Disposable Filters
Materials:
Medium: Pleated depth polypropylene

Core, cage and shell: Polypropylene
Connections:
Inlet/outlet: 3/8” or 1/4” Flaretek® fitting

Vent/drain: 1/4” Flaretek® fitting
Maximum operating conditions:
Maximum operating pressure: 0.27 MPa (2.7 bar, 40 PSI) at 25°C

Maximum forward/reverse differential pressure: 0.27 MPa (2.7 bar, 40 PSID) at 20°C

Maximum operating temperature: 40°C (104°F)

Ordering Information

Part Number Description Membrane/
Media/M.O.C.*
Retention Rating Connection Size O-Ring
PCC030LF1 PLanarcap TPX CMP Filter Polypropylene Flaretek®
PCC033LF1 PLanarcap TPX CMP Filter Polypropylene Flaretek®
S4423M026B06 PLanarcap TPX CMP Filter Polypropylene Flaretek®
S4423M020T09 PLanarcap TPX CMP Filter Polypropylene

How to Order From Entegris