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Planargard® CMP Cartridge Filters

Bulk filtration of CMP slurries

Data Sheet (695891)

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Available in 10”, 20” and 30” cartridges
Available in a range of sizes from <1 μm to 50 μm
Graded-density depth filter retains defect-causing agglomerates, removing only those particles that are distruptive
Designed to work with Chemlock® housings for rapid filter changeout

Planargard® CMP Cartridge Filters

Materials:	Filter element: All-polypropylene construction
	O-ring: EPR
Connections:	Code 0, 2-222
Maximum operating conditions:	Maximum forward differential pressure 0.48 MPa (4.8 bar, 70 PSID) at 25°C