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Solaris® CL Depth Filters

Point-of-use (POU) CMP filter
Data Sheet (487448)
 
Solaris® CL Depth Filters
  • Designed to meet the needs of next-generation point-of-use (POU) slurries
  • Optimized depth media with superior agglomerate and gel holding capability prolongs filter life over traditional depth filters
  • Self-venting in vertical installation ensures optimum flow characteristics
  • All-polypropylene construction with melt-blown wrapped depth filtration media
  • Optimized wrapped media provides enhanced balance of retention with filter lifetime
  • Disposable, Connectology® design enables rapid, safer installation
 
Solaris® CL Depth Filters
Materials:
 Media: Wrapped melt-blown polypropylene

O-ring: Ethylene-Polypropylene Rubber (EPR)
Operating conditions:
 Maximum forward pressure: 50 PSI @ 20°C (68°F)

Chemical Mechanical Planarization (CMP) - specific to Solaris filters

Melt-blown graded density polypropylene filters for silica and alumina CMP slurries. Designed for point-of-dispense applications in semiconductor and data storage applications.

Ordering Information

Part Number Description Membrane/
Media/M.O.C.* 		Retention Rating Connection Size O-Ring
SDR035CE1 Solaris® CL CMP Filter Depth 0.30 Connectology® 5
SDR0353E1 Solaris® CL CMP Filter Depth 0.30 Flaretek® 5
SDR055CE1 Solaris® CL CMP Filter Depth 0.50 Connectology® 5
SDR0553E1 Solaris® CL CMP Filter Depth 0.50 Flaretek® 5
SDR075CE1 Solaris® CL CMP Filter Depth 0.70 Connectology® 5
SDR0753E1 Solaris® CL CMP Filter Depth Flaretek® 5
S4423M020B08 Solaris® CL CMP Filter Depth 10
SDR105CE1 Solaris® CL CMP Filter Depth Connectology® 5
SDR1053E1 Solaris® CL CMP Filter Depth Flaretek® 5
SDR3053E1 Solaris® CL CMP Filter Depth Flaretek® 5
SDR305CE1 Solaris® CL CMP Filter Depth Connectology® 5

How to Order From Entegris