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Solaris® SCR Filters

Point-of-use (POU) CMP filter
Data Sheet (539734)
 
Solaris® SCR Filters
  • Unique stacked bed media design allows precise filtration performance
  • Available as a 5” and 10” disposable filter
  • Available in 1.5 µm and 3.0 µm retention ratings
  • All-polypropylene construction with melt-blown stacked bed depth filtration media
 
Solaris® SCR Filters
Materials:
 Media: Wrapped melt-blown polypropylene

O-ring: Ethylene-Polypropylene Rubber (EPR)
Operating conditions:
 Maximum forward pressure: 50 PSI @ 20°C (68°F)

Chemical Mechanical Planarization (CMP) - specific to Solaris filters

Melt-blown graded density polypropylene filters for silica and alumina CMP slurries. Designed for point-of-dispense applications in semiconductor and data storage applications.

Ordering Information

Part Number Description Membrane/
Media/M.O.C.* 		Retention Rating Connection Size O-Ring
SCR0153E1 Solaris® SCR CMP Filter Depth Flaretek® N/A
SCR015CE1 Solaris® SCR CMP Filter Depth Connectology® N/A
SCR0313E1 Solaris® SCR CMP Filter Depth Flaretek® 10
SCR035CE1 Solaris® SCR CMP Filter Depth Connectology® N/A

How to Order From Entegris