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Solaris® Filtration Manifold

For low-flow, point-of-use CMP applications
Data Sheet (158205)
 
Solaris® Filtration Manifold
  • Self-venting filtration - Eliminates dead space and potential for slurry dry-out in the filtration media, ensuring longer life
  • More than twice the lifetime of conventional depth filters, Solaris filtration technology delivers long-lasting, easy-to-use, disposable methods of reducing defect-causing particles, gels and agglomerates while simultaneously allowing working particles to pass
  • Long-life, multi-stage filters and manifolds are designed for optimum gel removal and media specific particle and agglomerate retention in the most demanding CMP applications
 
Solaris® Filtration Manifold
Length (connector to connector):
 344.17 mm (13.55”)
Length, mounting plate:
 299.7 mm (11.80”)
Width, mounting plate:
 82.55 mm (3.25")
Height:
 114.8 mm (4.52”)
Connections:
 Solaris filtration rapid-connections