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Silicon Oxide Coating

Particle reduction during semiconductor wafer processing and IR Optics
 
  • Oxidation/corrosion protection
  • Optically transparent
  • Excellent breakdown voltage
  • AR properties of the coating make it suitable for coating IR optics
 
Silicon Oxide Coating
SubstrateCompatibility: Most metals and ceramics
Size: Up to 91.4 cm (36”)
Geometry: Any shape, including complex geometries
StructureAmorphous
TemperatureDeposition: Max 150˚C (302˚F)
Use: 1000˚C (1832˚F)
Coating thicknessA few mn to over 100 μm
Electrical resistivity˜1013 Ω-cm
Hardness800 DPHN
Dielectric Strength80 V/micron
Purity99.95%
ResistanceWear/abrasion: Very good
Corrosion: Excellent aqueous corrosion resistance
Corrosion: Resistant to acids and alkalis