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Chambergard™ Fast Vent Diffusers

Dramatically reduces particles and vent times in load lock and transfer chambers
Data Sheet (1219633)
 
Chambergard™ Fast Vent Diffusers
  • Increase system throughput by minimizing load lock vent cycle time
  • Provides rapid venting to atmosphere without disturbing or adding particles to wafers in the chamber
  • Combines flow characteristics of a diffuser with a high-efficiency filter to increase efficiency and throughput
 
Chambergard™ Fast Vent Diffusers
Materials:
 Diffuser element: Patented, sintered nickel membrane filter

Housing: 316L stainless steel

Surface finish internal: <=32 μin Ra
Performance:
 Downstream cleanliness: Cleanliness less than 0.03 particles/liter (<1 particle/ft3) greater than 0.01 μm at rated flow

Removal rating: >=0.003 μm

Reliability: 100,000 cycle reliability at maximum rated inlet pressure at 25°C (77°F)
Connections:
 Refer to datasheet and ordering information
Operating conditions:
 Refer to datasheet