Close
 
header top curve
Home   >   Products   >   Filtration   >   Gas Diffuser   >   ChamberGard™ Gas Diffusers   >   Chambergard™ II SF 3XP Mini XL Gas Diffusers

Products

Select one or more of the following fields in order to begin your search.
  Search by Industry   Applications or process step   Keyword or Product Name      
   and/or   and/or      Search

Special Note: Some product links may direct you to our peripheral websites (devicecare.com, diskcare.com, entegrisfluidhandling.com, entegrisfuelcells.com, entegrislifesciences.com, pvprocesssolutions.com, or wafercare.com)

Chambergard™ II SF 3XP Mini XL Gas Diffusers

High volume throughput and rapid venting to atmosphere
Data Sheet (659164)
 
Chambergard™ II SF 3XP Mini XL Gas Diffusers
  • High-flow, high-retention stainless steel diffusers decrease the number of diffusers in the chamber to achieve cost reductions
  • Rapid venting to atmosphere decreases cycle time and increases throughput
  • Removal of particles greater than 0.003 µm from incoming gas minimizes defects on wafers
 
Chambergard™ II SF 3XP Mini XL Gas Diffusers
Materials:
 Membrane, fitting: 316L stainless steel
Removal rating:
 ≥99.99999% removal of ≥0.003 µm particles in gas @ 200 SLM
Downstream cleanliness:
 Cleanliness <0.03 particles/L > 0.01 µm
Maximum differential pressure:
 5 bar (73 PSID)
Maximum operating temperature:
 460ºC (860ºF)
Warranty:
 5 year or 1,000,000 cycles 3
1 at room temperature and in inert gases
2 in inert gases
3 at room temperature, in inert gases and differential pressure ≥ 5 bar