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Chambergard™ FV50 Gas Diffuser

Efficient and robust Ni disk membrane
Data Sheet (723265)
 
Chambergard™ FV50 Gas Diffuser
  • Rated at 1,000,000 cycles and designed to operate at higher inert pressure compared to first-generation Chambergard products
  • Entegris' industry-leading, patented, sintered nickel technology in a compact diffuser unit provides superior performance in all applications
  • Removal of particles greater than 0.003 µm from incoming gas minimizes wafer defects
  • Easy installation/retrofit into existing tools with minimal downtime (including load lock chambers, cooling chambers, transfer chambers and process chambers)
  • Manufactured, tested and packaged in a cleanroom to assure product cleanliness at time of installation
  • Rapid vent, gentle flow to atmosphere decreases cycle time, increases throughput and OEE
 
Chambergard™ FV50 Gas Diffuser
Materials:
 Diffuser element: Patent pending, sintered nickel membrane filter

House: 316L stainless steel

Surface finish interior: <32 µin Ra
O-ring:
 Material: Fluoroelastomer

Size: 2-229

Groove ID: 59.9 mm (2.36")

Groove OD: 67.9 mm (2.67")

Groove depth: 2.6 mm (0.10")
Connections:
 Inlet: 1/4" VCR® compatible male gasket seal fitting

Outlet: ISO NW50 bulkhead mounting compatible wiht standard ISO bulkhead clamps
Downstream cleanliness:
 Cleanliness less than 0.03 particles/liter (< 1 particle/ft³) >0.01 µm rated flow
Removal rating:
 >0.003 µm
Operating conditions:
 Maximum inlet/outlet pressure: 4 bar (70 PSID)

Maximum operating temperature: 100°C (212°F) with o-ring; 400°C (752°F) with no o-ring
Warranty:
 5 years or 1,000,000 cycles

Chambergard FV50 Diffuser Performance

Chambergard FV50 Diffuser Dimensions