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Wafergard® II F Micro In-line Gas Filter

All-stainless steel gas filters for ultra-high purity gas filtration
Data Sheet (184987)
 
Wafergard® II F Micro In-line Gas Filter
  • Optimized high flow and high-retention 316L stainless steel filter element with 3x flow rate and 3-digit retention efficiency improvement over filter element
  • Standard size - ease of installation without design changes of gas panel or delivery system
  • All 316L stainless steel construction
  • Filter of choice for high-purity gas systems
  • Excellent gas compatibility with most semiconductor gases
  • Ideal for high-termperature and dynamic pressure applications
 
Wafergard® II F Micro In-line Gas Filter
Materials:
 Membrane, housing: 316L stainless steel
Surface finish interior:
 ≥5 µin Ra
Removal rating:
 ≥99.9999999% removal of ≥0.003 µm particles in gas @200 SLM
Downstream cleanliness:
 Cleanliness <0.03 µm particles/L > 0.01 µm
Operating conditions:
 Maximum operating pressure: 53 bar (768 PSIG)

Maximum differential pressure: 9.8 bar (142 PSIG)

Maximum operating temperature: 460°C (860°F)
Helium leak rating:
 9 x 10 (-10) Pam³/sec
Warranty:
 2 years