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Chacollet™ In-line Hydrocarbon Purifiers

Cost-effective hydrocarbon removal in lithography applications

Data Sheet (120722)

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Effectively removes the following impurities in purge gas: CDA, N₂, Ar and He
Excellent initial cleanliness: Less than 1 ppb of hydrocarbons (>C₆)
Maintains high retention in the following volatile impurities: Hydrocarbons (>C₆)
Can be used at ambient temperature, no power or heat required
Various models for various flow rate

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