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Luminousgard™ Gas Purifiers

For hydrocarbons, acids and amines removal in lithography applications
Data Sheet (283404)
 
Luminousgard™ Gas Purifiers
  • Effectively removes the following impurities in purge gas: CDA, N2, Ar and He
  • Maintains high retention in the following volatile impurities: Hydrocarbons (>C6); Acids - SO2, SO3, NO2, HCI, HF, Ch3COOH, H2S; Amines - NH3, CH3NH2, (CH3)3N
  • Excellent initial cleanliness: Less than 1 ppb of hydrocarbons (>C6) degassing at 1 SLPM
  • Effectively removes particles in gas stream
  • Can be used without power or heat required
  • Various models for various flow rate