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Etchgard™ HP Cartridge Filters

Hydrophilic, high-performance filters for HF and BOE recirculation bath processes
Data Sheet (634106)
 
Etchgard™ HP Cartridge Filters
  • Designed for use with Chemlock® housings for rapid filter changeout
  • High flow membrane provides rapid particle removal and microbubble control for faster bath startup and system qualification
  • Patented hydrophilic membrane structure eliminates nucleation sites to reduce the potential for microbubble formation
 
Etchgard™ HP Cartridge Filters
Materials:
 Membrane patented hydrophilic ultra-high molecular weight polyethylene (UPE)

Supports, core and sleeve: High-density polyethylene (HDPE)

O-rings: Teflon® fluoropolymer encapsulated Viton® fluoroelastomer (TEV)
Connections:
 Code 0 (2-222)
Membrane area:
 10”: 8,500 cm2 (9.2 ft.2)
Maximum operating conditions:
 Maximum forward/reverse differential pressure: 0.34 MPa (3.4 bar, 50 PSID) at 23°C

Maximum operating temperature: 60°C (140°F)
Cleanliness:
 Filter contributes <=2 parts/mL >=0.2 μm after five-minute flush at 5 L/min.

Ordering Information

Part Number Description Membrane/
Media/M.O.C.* 		Retention Rating Connection Size O-Ring
CPUV01PLT Etchgard® HP Liquid Filter UPE 0.10 N/A 10 Code 0 TEV®
CPUZ01P01 Etchgard® HP Liquid Filter UPE 0.05 N/A 10 Code 0 TEV®
CPUZ0SP01 Etchgard® HP Liquid Filter UPE 0.05 N/A 10 Code 0 TEV®
CPUV01P01 Etchgard® HP Liquid Filter UPE 0.10 N/A 10 Code 0 TEV®
CPUV0SP01 Etchgard® HP Liquid Filter UPE 0.10 N/A 4 Code 0 TEV®
EPFVHPXTW Etchgard® HP Liquid Filter UPE 0.10 3/4 T-L F N/A
EPFVHPSST Etchgard® HP Liquid Filter UPE 0.10 3/4 S-L TU N/A
EGDZHPXTH Etchgard® HP Liquid Filter UPE 0.05 3/4' T-Tube Pillar® N/A
EGDVHPXTH Etchgard® HP Liquid Filter UPE 0.10 3/4' T-Tube Pillar® N/A
CPUZ01PLT Etchgard® HP Liquid Filter UPE 0.05 N/A 10 Code 0 TEV®

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