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Guardian™ ECD Cartridge Filters

Hydrophilic, high-flow inert membrane with excellent flow/retention properties, ideal solution for wet cleans and CuECD
 
Guardian™ ECD Cartridge Filters
  • Provide excellent chemical compatibility, downstream chemical cleanliness, reduced system startup times and long lifetime
  • Highly hydrophilic surfaces reduce the potential for microbubble formation
  • High-flow asymmetric membrane delivers excellent performance while minimizing system pressure drop
  • Non-interactive surfaces will not react with typical plating additives and related process chemistries – ensures ultimate process protection
 
Guardian™ ECD Cartridge Filters
Materials:
 Membrane: Hydrophilic polyethersulfone (PES)

Supports, core and sleeve: High-density polyethylene (HDPE)

O-rings: Teflon® fluoropolymer encapsulated Viton® fluoroelastomer o-ring (TEV)
Connections:
 Code 0 (2-222)
Membrane area:
 10000 cm2 (10.76 ft2)
Maximum operating conditions:
 Maximum forward/reverse differential pressure:0.34 MPa (3.4 bar; 49 PSID) at 25°C (77°F)

Maximum operating temperature: 60°C (140°F)
Compatibility:
 Optimized for electrochemical deposition processes
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