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Guardian™ ECD Cartridge Filters

Hydrophilic, high-flow inert membrane with excellent flow/retention properties, ideal solution for wet cleans and CuECD

Data Sheet (400188)

Application Note (591505)

Larger Image

Provide excellent chemical compatibility, downstream chemical cleanliness, reduced system startup times and long lifetime
Highly hydrophilic surfaces reduce the potential for microbubble formation
High-flow asymmetric membrane delivers excellent performance while minimizing system pressure drop
Non-interactive surfaces will not react with typical plating additives and related process chemistries – ensures ultimate process protection

Guardian™ ECD Cartridge Filters

Materials:	Membrane: Hydrophilic polyethersulfone (PES)
	Supports, core and sleeve: High-density polyethylene (HDPE)
	O-rings: Teflon® fluoropolymer encapsulated Viton® fluoroelastomer o-ring (TEV)
Connections:	Code 0 (2-222)
Membrane area:	10000 cm² (10.76 ft²)
Maximum operating conditions:	Maximum forward/reverse differential pressure:0.34 MPa (3.4 bar; 49 PSID) at 25°C (77°F)
	Maximum operating temperature: 60°C (140°F)
Compatibility:	Optimized for electrochemical deposition processes

Ordering Information

Part Number	Description	Membrane/ Media/M.O.C.*	Retention Rating	Connection	Size	O-Ring
ECDY01M01	Guardian® ECD PEM Liquid Filter Cartridge	UPE	0.03	N/A	10	Code 0 E-FKM
ECDY01M01K	Guardian® ECD PEM Liquid Filter Cartridge	UPE	0.03	N/A	10	Code 0 E-FKM
ECDY01M01KSL	Guardian® ECD PEM Liquid Filter Cartridge	UPE	0.03	N/A	10	Code 0 E-FKM
ECDY01MK1	Guardian® ECD PEM Liquid Filter Cartridge	UPE	0.03	N/A	10
ECDY01MK1K	Guardian® ECD PEM Liquid Filter Cartridge	UPE	0.03	N/A	10
ECDY02M01	Guardian® ECD PEM Liquid Filter Cartridge	UPE	0.03	N/A	20	Code 0 E-FKM
ECDY02M01SL	Guardian® ECD PEM Liquid Filter Cartridge	UPE	0.03	N/A	20	Code 0 E-FKM
ECDY02M01K	Guardian® ECD PEM Liquid Filter Cartridge	UPE	0.03	N/A	20	Code 0 E-FKM
ECDY02MK1	Guardian® ECD PEM Liquid Filter Cartridge	UPE	0.03	N/A	20
ECDY02MK1K	Guardian® ECD PEM Liquid Filter Cartridge	UPE	0.03	N/A	20
ECDY0SM01	Guardian® ECD PEM Liquid Filter Cartridge	UPE	0.03	N/A	4	Code 0 E-FKM
ECDY0SMK1	Guardian® ECD PEM Liquid Filter Cartridge	UPE	0.03	N/A	4
ECDZ01P01	Guardian® ECD PEX Liquid Filter Cartridge	UPE	0.05	N/A	10	Code 0 E-FKM
ECDZ01P01K	Guardian® ECD PEX Liquid Filter Cartridge	UPE	0.05	N/A	10	Code 0 E-FKM
ECDZ01PK1	Guardian® ECD PEX Liquid Filter Cartridge	UPE	0.05	N/A	10
ECDZ01PK1K	Guardian® ECD PEX Liquid Filter Cartridge	UPE	0.05	N/A	10
ECDZ02P01	Guardian® ECD PEX Liquid Filter Cartridge	UPE	0.05	N/A	20	Code 0 E-FKM
ECDZ02P01K	Guardian® ECD PEX Liquid Filter Cartridge	UPE	0.05	N/A	20	Code 0 E-FKM
ECDZ02PK1	Guardian® ECD PEX Liquid Filter Cartridge	UPE	0.05	N/A	20
ECDZ02PK1K	Guardian® ECD PEX Liquid Filter Cartridge	UPE	0.05	N/A	20
ECDZ0SP01	Guardian® ECD PEX Liquid Filter Cartridge	UPE	0.05	N/A	4	Code 0 E-FKM
ECDZ0SP01K	Guardian® ECD PEX Liquid Filter Cartridge	UPE	0.05	N/A	4	Code 0 E-FKM
ECDZ0SPK1	Guardian® ECD PEX Liquid Filter Cartridge	UPE	0.05	N/A	4
ECDZ0SPK1K	Guardian® ECD PEX Liquid Filter Cartridge	UPE	0.05	N/A	4
ECDV01P01	Guardian® ECD PEX Liquid Filter Cartridge	UPE	0.10	N/A	10	Code 0 E-FKM
ECDV01P01K	Guardian® ECD PEX Liquid Filter Cartridge	UPE	0.10	N/A	10	Code 0 E-FKM
ECDV01PK1	Guardian® ECD PEX Liquid Filter Cartridge	UPE	0.10	N/A	10
ECDV01PK1K	Guardian® ECD PEX Liquid Filter Cartridge	UPE	0.10	N/A	10
ECDV02P01	Guardian® ECD PEX Liquid Filter Cartridge	UPE	0.10	N/A	20	Code 0 E-FKM
ECDV02P01K	Guardian® ECD PEX Liquid Filter Cartridge	UPE	0.10	N/A	20	Code 0 E-FKM
ECDV02PK1	Guardian® ECD PEX Liquid Filter Cartridge	UPE	0.10	N/A	20
ECDV02PK1K	Guardian® ECD PEX Liquid Filter Cartridge	UPE	0.10	N/A	20
ECDV0SP01	Guardian® ECD PEX Liquid Filter Cartridge	UPE	0.10	N/A	4	Code 0 E-FKM
ECDV0SP01K	Guardian® ECD PEX Liquid Filter Cartridge	UPE	0.10	N/A	4	Code 0 E-FKM
ECDV0SPK1	Guardian® ECD PEX Liquid Filter Cartridge	UPE	0.10	N/A	4
ECDV0SPK1K	Guardian® ECD PEX Liquid Filter Cartridge	UPE	0.10	N/A	4

How to Order From Entegris

Region	Telephone	Fax
North America	800-394-4083	800-763-5820
Germany	+49 (0) 351 79597-0	+49 (0) 351 79597-499
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United Kingdom	+33 4 76 35 73 54	+33 4 76 35 73 80
Italy	+33 4 76 35 73 52	+33 4 76 35 73 80
India	+91 (0) 80 41 66 9660	+91 (0) 80 41 66 9661
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Singapore	+65-6745-2422	+65-6745-4477
China	+86-21-28986710	+86-21-5080-5598