Close
 
header top curve
Home   >   Products   >   Filtration   >   Liquid Filtration   >   Weak Base Filtration   >   Guardian™ DEV Filters

Products

Select one or more of the following fields in order to begin your search.
  Search by Industry   Applications or process step   Keyword or Product Name      
   and/or   and/or      Search

Special Note: Some product links may direct you to our peripheral websites (devicecare.com, diskcare.com, entegrisfluidhandling.com, wafercare.com or entegrisfuelcells.com)

Guardian™ DEV Filters

Low-cost solution for KOH and TMAH based developer solution and other high pH chemical filtration applications
 
  • Patented hydrophilic UPE membrane spontaneously wets to enable rapid system startup
  • All polyethylene construction provides excellent chemical compatibility and long lifetime in a cost-effective device
 
Guardian™ DEV Cartridge Filters
Materials:
Membrane: Patented hydrophilic ultra-high molecular weight polyethylene (UPE)

Supports, core and sleeve: High-density polyethylene (HDPE)

O-rings: Ethylene Propylene Rubber (EPR), Teflon® fluoropolymer encapsulated Viton® fluoroelastomer (TEV), or Kalrez® perfluoroelastomer O-ring
Connections:
Code 0 (2-222)
Membrane area:
10”: 8500 cm2 (9.15 ft2)

20”: 17000 cm2 (18.3 ft2)

30”: 25500 cm2 (27.5 ft2)
Maximum operating conditions:
Maximum forward differential pressure: 0.35 MPa (3.5 bar, 50 PSID) at 25°C

Maximum reverse differential pressure: 0.25 MPa (2.5 bar, 35 PSID) at 25°C

Maximum operating temperature: 60°C
Compatibility:
Recommended for use in chemical delivery systems, single pass and spray tool applications using aqueous-based developer solutions (DO NOT use this filter with aromatic hydrocarbons)
Cleanliness:
Filter contributes <2 particles/mL ≥0.2 μm after five-minute flush at 5 L/min.
Guardian™ DEV Disposable Filters
Materials:
Membrane: Patented hydrophilic ultra-high molecular weight polyethylene (UPE)

Supports, core and sleeve: High-density polyethylene (HDPE)

Shell: Polypropylene
Connections:
Inlet/outlet: 3/8”, 1/2”, 3/4” or 1” Flaretek® compatible fittings

Vents and drains: 1/4” Flaretek® compatible fittings
Membrane area:
8500 cm2 (9.15 ft2)
Maximum operating conditions:
Maximum forward differential pressure: 0.35 MPa (3.5 bar, 50 PSID) at 25°C

Maximum reverse differential pressure: 0.25 MPa (2.5 bar, 35 PSID) at 25°C

Maximum operating temperature: 70°C (158°F)
Compatibility:
Recommended for use in chemical delivery systems, single pass and spray tool applications using aqueous-based developer solutions (DO NOT use this filter with aromatic hydrocarbons)
Cleanliness:
Filter contributes <2 particles/mL ≥0.2 μm after five-minute flush at 5 L/min.