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Impact Mini Filters

Rapid changeout UPE membrane filter for point-of-use photochemical filtration, including photoresists and solvents
 
Impact Mini Filters
  • Ultra low hold-up volume minimizes chemical waste, reduces opportunities for nucleation sites
  • Low surface area reduces chemical waste during filter startup
  • Lower surface area and elimination of a cage insures lower extractables and ultra cleanliness
  • Designed for use with IntelliGen® Mini dispense system
 
Impact Mini Filters
Materials:
Membrane: Ultra-high molecular weight polyethylene (UHMWPE)

Supports (upstream, downstream, and mold): High-density polyethylene (HDPE)

O-ring: Kalrez® perfluoroelastomer, on filter
Maximum operating conditions:
Maximum inlet pressure: 0.34 MPa (3.4 bar, 50 PSI) at 25°C (77°F)

Maximum forward/reverse differential pressure: 0.27 MPa (2.7 bar, 40 PSI) at 25°C (77°F)

Maximum operating temperature: 40°C (104°F)
Membrane area:
250 cm2 (0.269 ft2)
Hold-up volume:
<15 cc
Compatibility:
PGMEA, PGME, NMP, Ethyl lactate, MMP and cyclohexanone
Wettability:
Spontaneously wets in Butyl acetate, PGMEA, PGME, Ethyl lactate, MMP, ECA, NMP
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