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Intercept® Plus HPM Filters

Highest flow hydrophilic UPE membranes with the greatest particle removal for sub-micron batch baths and single wafer tools
 
Intercept® Plus HPM Filters
  • Dual-particle capture mechanism - patented hydrophilic membrane structure provides ultra particle removal capabilities
  • High-flow membrane with ultra-large filtration area provides rapid particle removal and microbubble control for faster bath startup and system qualification
  • Excellent small particle retention
  • High membrane area
 
Intercept® Plus HPM Disposable Filters
Materials:
 Membrane: Hydrophilic ultra-high molecular weight polyethylene (UPE)

Supports, core and sleeve: High-density polyethylene (HDPE)

Disposable shell: Polypropylene

Flaretek® nuts: PVDF
Fittings:
 Inlet/outlet: 3⁄8”, 1⁄2”, 3⁄4” or 1” Flaretek® fittings or compatible

Vents and drains: 1/4” Flaretek® fittings or compatible
Membrane area:
 19000 cm2 (20.5 ft2)
Maximum operating conditions:
 Maximum forward differential pressure: 0.34 MPa (3.4 bar, 50 PSID) at 23° C; 0.28 MPa (2.8 bar, 40 PSID) at 70°C

Maximum reverse differential pressure: 0.21 MPa (2.2 bar, 30 PSID) @ 25°C (77°F)

Maximum operating temperature: 70°C (158°F) at 30 PSID forward