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Bulk/Facilities CMP Filter

High volume filtration of bulk slurry
Data Sheet (605751)
 
Bulk/Facilities CMP Filter
  • Nonwoven media design enables the filter to retain defect-causing agglomerates with high efficiency
  • Removes only those particles that are disruptive - avoiding altering the particle size distribution of the "working" slurry particles
  • Available in 0.2 to 50 µm retention ratings
 
Planargard® NMB Cartridge Filter
Materials:
 Membrane: Polypropylene

Support: Polypropylene

Cartridge o-ring: EPR, Silicon, 2-222
Product type:
 NMB
Maximum operating conditions:
 Maximum temperature: 80°C (176°F)

Maximum forward differential pressure: 0.48 MPa (4.8 bar, 70 PSI) @ 25°C (77°F)
Planargard® CL Bulk Cartridge Filters
Materials:
 Membrane, core, sleeve, endcaps: Polypropylene

O-ring: EPR
Connection:
 Code 0, 2-222
Maximum operating conditions:
 Maximum forward differential pressure: 0.48 MPa (4.8 bar, 70 PSI) at 25°C

Maximum reverse pressure: 0.15 MPa (1.5 bar, 22 PSI) at 20°C
Available sizes:
 5”, 10”, 20”, 30”
Available retention ratings:
 0.3, 0.5, 0.7 and 1.0 μm
Planargard® CS Bulk Cartridge Filters
Materials:
 Filter element: All-polypropylene construction

O-ring: EPR
Connection:
 Code 0, 2-222
Maximum operating conditions:
 Maximum forward differential pressure: 0.48 MPa (4.8 bar, 70 PSI) at 25°C
Planargard® CMP Cartridge Filters
Materials:
 Filter element: All-polypropylene construction

O-ring: EPR
Connections:
 Code 0, 2-222
Maximum operating conditions:
 Maximum forward differential pressure 0.48 MPa (4.8 bar, 70 PSID) at 25°C