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Point-of-Dispense (POD)

Installed at the point-of-dispense in the CMP Tool
Data Sheet (809975)
 
  • Developed to be installed at the point-of-dispense (POD) on the CMP slurry tool to prevent wafer contamination
  • Removes defect-causing agglomerates and gels from CMP slurries
  • Optimized graded-density depth media pleated design to provide the best combination of surface area and media gradient
 
Planarcap® KPX Point-of-Dispense CMP Filter
Materials:
 Media: Polypropylene

Core, cage, shell: Polypropylene

Fitting connection: Inlet/outlet - 1/4" flare, 3/8" flare

Fitting connection: Vent/drain - 1/8" MNPT, 1/4" flare
Length:
 Short - 152 mm (5.98"), Long - 208 mm (8.19")

Diameter: 68 mm (3.7")
Maximum operating pressure:
 Maximum operating pressure: 0.27 MPa (2.7 bar, 40 PSI) @ 25°C (77°F)

Maximum forward/reverse differential pressure: 0.27 MPa (2.7 bar, 40 PSI) @ 20°C (68°F)

Maximum operating temperature: 40°C (104°F)
Planarcap® LPX Disposable Filters
Materials:
 Medium: Pleated depth polypropylene

Core, cage and shell: Polypropylene
Connections:
 Inlet/outlet: 3/8” or 1/4” Flaretek® fitting

Vent/drain: 1/4” Flaretek® fitting*
Maximum operating conditions:
 Maximum operating pressure: 0.27 MPa (2.7 bar, 40 PSI) at 25°C

Maximum forward/reverse differential pressure 0.27 MPa (2.7 bar, 40 PSID) at 20°C

Maximum operating temperature: 40°C (104°F)
Notes:
 *Part number SKNP 010L2F is available with 1/8” MNPT vent/drain