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Planarcap LPX Disposable Filters

Point-of-use disposable filters for silica and alumina abrasives for oxide and copper CMP
 
Planarcap LPX Disposable Filters
  • Designed for use with silica and alumina slurry solutions – most typically used in copper, ILD, STI and tungsten CMP applications
  • Available in a wide range of retention ratings from 1 µm to 5 µm
  • Meets the needs of point-of-use CMP slurry filtration applications
  • Available as a disposable filters with Flaretek® fittings
  • All polypropylene construction with pleated filtration media
 
Planarcap LPX Disposable Filters
Materials:Medium: Pleated depth polypropylene
Core, cage and shell: Polypropylene
Connections:Inlet/outlet: 3/8” or 1/4” Flaretek® fitting
Vent/drain: 1/4” Flaretek® fitting*
Maximum operating conditions:Maximum operating pressure: 0.27 MPa (2.7 bar, 40 PSI) at 25°C
Maximum forward/reverse differential pressure 0.27 MPa (2.7 bar, 40 PSID) at 20°C
Maximum operating temperature: 40°C (104°F)
Notes:* Part number SKNP 010L2F is available with 1/8” MNPT vent/drain.