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Planargard CMP Cartridge Filters

Bulk filtration of CMP slurries
 
Planargard CMP Cartridge Filters
  • Available in 10”, 20” and 30” cartridges
  • Available in a range of sizes from <1 μm to 50 μm
  • Graded-density depth filter retains defect-causing agglomerates, removing only those particles that are distruptive
  • Designed to work with Chemlock® housings for rapid filter changeout
 
Planargard CMP Cartridge Filters
Materials:Filter element: All polypropylene construction
O-ring: EPR
Connections:Code 0, 2-222
Maximum operating conditions:Maximum forward differential pressure 0.48 MPa (4.8 bar, 70 PSID) at 25°C
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