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Pumpgard II Filters

Protecting wet station chemical pumps from wafer particles
 
  • Cost-effective protection of expensive chemical pumps and final filters
  • Large pore size for component protection with minimum system pressure drop
  • Fluoropolymer construction for compatibility with most acids, bases and non-flammable solvents
  • Compact design for easy installation/retrofit to existing system
 
Pumpgard II Filters
Materials:Filter: PFA net
Housing: 440 HP PFA
Filtration area:23 cm2 (3.5 in2)
Connections:3/4” tube (inlet/outlet)
3/4” Flaretek® fitting compatible (inlet/outlet)
1” Flaretek® fitting compatible (inlet/outlet)
Retention rating:60 μm
Maximum operating conditions:Maximum input pressure: 0.345 MPa (3.45 bar, 50 PSI) at 25°C
Maximum forward/reverse differential pressure: 0.345 MPa (3.45 bar, 50 PSID) at 25°C
Maximum operating temperature: 3/4”: 180°C at 14 PSI; 1”: 180°C at 10 PSI