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Thermogard™ NE Nitride Etch Filters

Increased structural stability for high-temperature and high-viscosity conditions
Data Sheet (1120802)
 
Thermogard™ NE Nitride Etch Filters
  • For high-temperature and high-viscosity conditions
  • High-performance membrane rapidly reduces particle counts
  • Unique patented membrane prevents dewetting during installation or chemical dumps/drains and outgassing chemistries
  • Nondewetting membrane technology in a prewet filter designed for nitride etch baths and other high-temperature applications
 
Thermogard™ NE Nitride Etch Filters
Materials:
 Membrane: Nondewetting PTFE packaged in high-purity DI water

Cartridge and disposable supports: PFA

Disposable shell: PFA
Retention rating:
 0.2 μm
Membrane area:
 10”: 9,950 cm2 (10.7 ft2)
Maximum operating conditions:
 Maximum operating pressure: 0.58 MPa (5.8 bar; 84 PSI) at 25° C; 0.097 MPa (0.97 bar; 14 PSI) at 180° C

Maximum forward differential pressure: 0.14 MPa (4.14 bar; 60 PSID) at 25° C; 0.048 MPa (0.48 bar; 7 PSID) at 180°C

Maximum reverse differential pressure: 0.414 MPa (4.14 bar; 60 PSID) @ 25°C

Maximum operating temperature: 180°C
Performance:
 TOC recovery within 10 ppb of feed after a 120-liter flush at 1 L/min.

Resistivity recovery within 0.5 mega-ohm of feed within a 120-liter flush flowing at 1 L/min.

Cleanliness: < 25 particles/L >0.5 μm after a 17-minute flush at 12 L/min.

Ordering Information

Part Number Description Membrane/
Media/M.O.C.* 		Retention Rating Connection Size O-Ring
TGDGATXTW Thermogard® NE Nitride Etch Filters PTFE 0.20
TGDGATXLH Thermogard® NE Nitride Etch Filters PTFE 0.20 3/4" L-Line Pillar®
TGDGATXTF Thermogard® NE Nitride Etch Filters PTFE 0.20
TGDGATXTH Thermogard® NE Nitride Etch Filters PTFE 0.20 3/4' T-Tube Pillar®
TGDGATXT3 Thermogard® NE Nitride Etch Filters PTFE 0.20
TGDGATX4F Thermogard® NE Nitride Etch Filters PTFE 0.20 Flaretek®
TGDGATX2F Thermogard® NE Nitride Etch Filters PTFE 0.20 Flaretek®
TGDGATX0F Thermogard® NE Nitride Etch Filters PTFE 0.20 Flaretek®
TGDGATX1F Thermogard® NE Nitride Etch Filters PTFE 0.20 Flaretek®
TGVGATX4S Thermogard® NE Nitride Etch Filters PTFE 0.20 1" S 300 Pillar®
TGVGATX3S Thermogard® NE Nitride Etch Filters PTFE 0.20 3/4" Pillar® S300

How to Order From Entegris  

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