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Torrento ATE Filters

New standard for high-flow nondewetting Teflon® filters
 
Torrento ATE Filters
  • Low membrane resistance design allows 20 nm retention with high flow
  • High flow and low flux allows extended filter lifetime
  • Eliminates pre-wetting and flushing cycles
  • Excellent performance in out-gassing chemistries
  • Recommended for aqueous-based chemicals at ambient temperatures (including H2SO4, H3PO4, HNO3, HCL, NH4F, H2O2, TMAH, NH4OH and ozonated water) and elevated temperature applications (including SPM, SC1, SC2, SPM, nitride etch, metal etch and organic stripers).
  • ATE design incorporates more membrane for ultra-high flow and extended filter lifetime
  • Nondewetting membrane enables rapid filter “changeout” to maximize process uptime
  • Reduced wear and tear of wet bench pumps minimizes maintenance and replacement costs
 
Torrento ATE Filters
Materials:Membrane: Prewet, nondewetting PTFE
Supports: PFA
Cartridge o-rings: Teflon® fluoropolymer encapsulated Viton® fluoropolymer o-ring (TEV), Chemraz® or Kalrez® perfluoroelastomers, Viton® Extreme™ ETP
Disposable Shell: PFA, containing ultrapure DI water
Retention Rating:20 nm (0.02 µm)
Membrane Area:21,000 cm2 (23.6042 ft2)
Maximum Operating Conditions:Maximum forard differential pressure: 0.44 MPa (4.41 bar; 64 PSID) @ 25°C
0.05 MPa (0.51 bar; 7.5 PSID) 180°C
Maximum reverse differential pressure: 0.35 MPa (3.5 bar: 50 PSID) @ 25°C
Maximum operating conditions: 180°C (at the above conditions)
Compatibility:Recommended for aqueous-based chemicals at ambient temperatures (including H24, H3PO4, HNO3, HCL, NH4F, H2O2, TMAH, NH4OH and ozonated water) and elevated temperature applications (including SPM, SC1, SC2, SPM, nitride etch, metal etch and organic strippers).
Metal Extractables:Cartridges: Guaranteed levels to <25 µg/device (17 ppb in 1.5L 10% HC1)
Metal Extractables:Disposables: Guaranteed levels to <10 µg/device (7 ppb in 1.5L 10% HC1)
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