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SUPERSiC-Si-8C

SUPERSiC that has been infiltrated with silicon and then coated with a 200 μm CVD SiC coating
 
  • Ideal for optical and lithography components
 
SUPERSiC-Si-8C
Apparent density:
 3.03 g/cm3 (0.110 lb/in3)
Bulk density:
 2.95 g/cm3 (0.107 lb/in3)
Total porosity:
 4% (porosity is sealed under the dense coating, porosity is not exposed to the process)
Open porosity:
 0% (porosity sealed off by CVD SiC coating)
Total impurity level:
 <10 ppm
Flexural strength:
 223 MPa (32,360 psi)
Tensile strength:
 124 MPa (17,940 psi)
Elastic modulus:
 338 GPa (49 106 psi)
Specific stiffness:
 121 kN.m/g
Poisson’s ratio:
 0.17
Dynamic shear modulus:
 138 GPa (20 106 psi)
Fracture toughness:
 2.63 MPa.m0.5
Thermal diffusivity:
 115 mm2/s
Thermal conductivity:
 220 W/m-K (127 BTU-ft/hr/ft2°F)
Electrical resistivity:
 4000 μΩ-cm (1570 μΩ-in)
Instantaneous CTE at RT:
 2.4 10-6/K (1.3 10-6/°F)