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SUPERSiC-Si

SUPERSiC that has been infiltrated with high-purity silicon
 
  • Ideal for etch systems
 
SUPERSiC-Si
Apparent density:
 3.01 g/cm3 (0.109 lb/in3)
Bulk density:
 2.93 g/cm3 (0.106 lb/in3)
Total porosity:
 4%
Open porosity:
 0.5%
Total impurity level:
 <10 ppm
Flexural strength:
 223 MPa (32,360 psi)
Tensile strength:
 124 MPa (17,940 psi)
Elastic modulus:
 338 GPa (49 106 psi)
Specific stiffness:
 121 kN.m/g
Poisson’s ratio:
 0.17
Dynamic shear modulus:
 138 GPa (20 106 psi)
Fracture toughness:
 2.63 MPa.m0.5
Hardness:
 1643 kg/mm2
Thermal diffusivity:
 115 mm2/s
Thermal conductivity:
 220 W/m-K (127 BTU-ft/hr/ft2°F)
Electrical resistivity:
 4000 μΩ-cm (1570 μΩ-in)
Instantaneous CTE at RT:
 2.4 10-6/K (1.3 10-6/°F)