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SUPERSiC

SUPERSiC is the base converted SiC SUPERSiC is the base SiC of Entegris, converted graphite.
 
  • High-temperature and atmospheric processes
  • Harsh process environments
 
SUPERSiC
Apparent density:
 3.13 g/cm3 (0.113 lb/in3)
Bulk density:
 2.53 g/cm3 (0.092 lb/in3)
Total porosity:
 20%
Open porosity:
 19%
Total impurity level:
 <10 ppm
Flexural strength:
 155 MPa (22,400 psi)
Tensile strength:
 129 MPa (18,700 psi)
Elastic modulus:
 216 GPa (31 106 psi)
Specific stiffness:
 85 kN.m/g
Poisson’s ratio:
 0.17
Dynamic shear modulus:
 96 GPa (14 106 psi)
Fracture toughness:
 2.3 MPa.m0.5
Hardness knoop:
 1992 kg/mm2
Thermal diffusivity:
 100 mm2/s
Thermal conductivity:
 170 W/m-K (98 BTU-ft/hr/ft2°F)
Electrical resistivity:
 4000 μΩ-cm (1570 μΩ-in)
Instantaneous CTE at RT:
 2.4 10-6/K (1.3 10-6/°F)