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SilicoMax™ Coating

Ultrapure silicon carbide coating
Data Sheet (920868)
 
SilicoMax™ Coating
  • High-purity, dense and mirco-conformal coating with very low residual stress
  • Oxidation resistance, especially in the presence of moisture
  • High electrical resistivity
  • Corrosion resistant in acids and alkalis
  • Low-temperature plasma deposition process
  • Coating composition can be tailored from silicon rich to stoichiometic silicon carbide
  • Applications for semiconductor and optics markets
 
SilicoMax™ Coating
Substrate:
 Compatibility: Most metals and ceramics

Size: Up to 91 cm (36”)

Geometry: Any shape, including complex geometries
Structure:
 Amorphous
Temperature:
 Deposition: <150˚C (302˚F)

Use: 650˚C (1202˚F)
Coating thickness:
 A few nm to over 60 μm
Electrical resistivity:
 ˜108 Ω-cm
Hardness:
 1600 DPHN
Purity:
 99.95%
Wear resistance:
 Very good
Oxidation/corrosion resistance:
 High-temperature oxidation resistance in air up to 600˚C (1202˚F)

Excellent aqueous corrosion resistance including acids and alkalis