Close
 
header top curve
Home   >   Products   >   Specialty Materials   >   Specialty Coatings   >   PECVD Coatings   >   UltraC-HT™ Coating

Products

Select one or more of the following fields in order to begin your search.
  Search by Industry   Applications or process step   Keyword or Product Name      
   and/or   and/or      Search

Special Note: Some product links may direct you to our peripheral websites (devicecare.com, diskcare.com, entegrisfluidhandling.com, entegrisfuelcells.com, entegrislifesciences.com, pvprocesssolutions.com, or wafercare.com)

UltraC-HT™ Coating

Exceptionally tough diamond-like carbon
Data Sheet (323480)
 
  • Mono-dimensionally modulated (MDM) coating system consists of individual layers of two materials differing in elastic modulus
  • Excellent abrasive/erosion wear resistance
  • Extreme toughness
  • High strength
  • Super lubricious
  • Applications in semiconductor, medical, aerospace and oil exploration markets
 
UltraC-HT™ Coating
Substrate:
Compatibility: Most metals and ceramics (AIN, Al2O3, quartz, YSZ, silicon, graphite, etc.), silicon wafers and polymers

Size: Up to 91 cm (36”)

Geometry: Any shape, including complex geometries
Structure:
Dense, amorphous, mono-dimensionally modulated (MDM), multilayered
Temperature:
Deposition: 150˚C (302˚F)

Use: -50 to 400˚C (-58 to 752˚F)
Coating thickness:
1-50 μm
Electrical resistivity:
108 Ω-cm
Coefficient of friction:
0.04 - 0.08
Hardness:
>2000 DPHN
Wear resistance:
Excellent
Corrosion resistance:
Resistant to most acids and alkalis, acid fluxes and solders