Close
 
header top curve
Home   >   Products   >   Specialty Materials   >   Specialty Coatings   >   PECVD Coatings   >   Ultrapure Silicon Coating

Products

Select one or more of the following fields in order to begin your search.
  Search by Industry   Applications or process step   Keyword or Product Name      
   and/or   and/or      Search

Special Note: Some product links may direct you to our peripheral websites (devicecare.com, diskcare.com, entegrisfluidhandling.com, entegrisfuelcells.com, entegrislifesciences.com, pvprocesssolutions.com, or wafercare.com)

Ultrapure Silicon Coating

Ultra-high purity silicon coating
Data Sheet (232798)
 
Ultrapure Silicon Coating
  • 99.995% purity
  • Dense, hard and micro-conformal
  • Excellent adhesion and compliance on a wide variety of substrates
  • Excellent surface smoothness
  • Low residual stress
  • Applications in semiconductor equipment and optics markets
 
Ultrapure Silicon Coating
Substrate:
 Compatibility: Metals, ceramics (AIN, AI2O3, quartz, PSZ, graphite, etc.), and polymers

Size: up to 91 cm (36”)

Geometry: Any shape, including complex geometries
Structure:
 Amorphous; contains hydrogen
Temperature:
 Deposition: Below 150˚C (302˚F)

Use: -50˚C to 600˚C (-58˚F to 1112˚F)
Coating thickness:
 A few nm to over 150 μm
Electrical resistivity:
 5 x 108 Ω-cm, lower values possible
Hardness:
 600 DPHN
Purity:
 99.995%
Wear resistance:
 Good
Corrosion resistance:
 Excellent resistance in aqueous, acidic and alkaline environments