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Yttria Coating

Fluorine etch resistant yttirum oxide coating
Data Sheet (447635)
 
Yttria Coating
  • Excellent fluorine etch resistance
  • Low particle generation
  • Dense and transparent
  • Oxidation and errosion resistant
  • Ideal for semiconductor and high-temperature applications
 
Yttria Coating
Substrate:
 Compatibility: Metals, ceramics (viz. quartz alumina, AIN)

Size: Up to 24" x 12"
Structure:
 Microcrystalline
Temperature:
 Deposition: 250˚C (482˚F)

Use: 1200˚C (2192˚F)
Coating thickness:
 Up to 6 μm
Electrical resistivity:
 >10-12 Ω-cm
Purity:
 99.95%
Composition:
 Y = 25%; O = 75%
Hardness:
 1400 DPHN
Elastic modulus:
 190 GPa
Roughness:
 2 nm
Corrosion resistance:
 Excellent etch resistance in fluorine environments

Oxidation resistant up to 1200˚C (2192˚F) in air

Resistant to most acids and alkalis