Analysis and reporting of airborne molecular contamination in high-tech environments
Entegris Analytical Services is the leader in the measurement of airborne molecular contamination (AMC) for semiconductor cleanrooms, photolithography applications and OEM compliance.
Analytical Services is one of 17 Entegris global laboratories and provides expertise for scanner/stepper OEM compliance, process troubleshooting, materials outgasing and chemical filter testing.
Typical AMC classes analyzed are volatile and nonvolatile organic compounds, anions (acids) and cations (bases) as well as low- and high-molecular weight, silicon containing compounds.
- Scanner/stepper OEM compliance
- General AMC analysis services
- Chemical filter performance testing
Why Choose Entegris Analytical Services?
Fastest AMC sampling service in the semiconductor industry
- In and out of the fab within one work shift
- Optimized technology for best performance
Emphasis on quality & ease of use
- Analytical Services is ISO 17025 accredited
- Worldwide network of trained and experienced sampling personnel
Strong relationships with Scanner OEMs
- A preferred partner for OEM compliance measurements.
Intimate AMC filter and applications expertise
- In-depth knowledge of the semiconductor industry, its processes and AMC challenges
- Expertise to put results in perspective and assist in solving problems or identifying contamination sources
- Broad suite of products for comprehensive contamination control solutions.
For more information on how to take advantage of the specialized expertise in identifying, measuring and controlling airborne molecular contamination, please contact us.