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Cleanroom Filtration

Cleanroom chemical filter to control airborne molecular contamination
Data Sheet (107278)

 

Utlizing unique chemistry to remove critical contaminants at a lower pressure drop, Vaporsorb™ cleanroom chemical filters deliver >95% removal efficiency. Implementation of the filter is easy in front/rear access frame banks, side access housing units or ceiling mounted fan units.
Vaporsorb™ CSP Cleanroom Chemical Filters
Superior protection against contaminants
  • A unique blended media with greater surface area removes a comprehensive array of AMCs in a single filter cell
  • Custom blends available to meet a specific list of target AMCs
  • High removal efficiency >95%
  • Removes critical acids, bases and organics from the fab ambient to reduce contamination risk
  • Low pressure drop reduces energy costs
  • Can be installed in built-up front/rear-access frame banks or side access housings or in ceiling-mounted fan units
  • Materials of construction certified zero off gas
  • Optimized for cleanroom, high-flow make up air, Airborne Molecular Contamination Control
  • Removes a comprehensive array of AMCs in single filter cell