Special Note: Some product links may direct you to our peripheral websites (devicecare.com, diskcare.com, entegrisfluidhandling.com, entegrisfuelcells.com, entegrislifesciences.com, pvprocesssolutions.com, or wafercare.com)
One of the top Semiconductor OEMs was concerned about particle levels and cross-contamination risks as FOUPs moved though its research and development fab. The Entegris On-Site Service team, supported by Entegris Application Team and Entegris’ Analytic Labs, developed a DOE to assess the risks to the OEM’s FOUPs and processes.
After completing the testing, the Entegris On-Site team presented a comprehensive report on the various contributors to contamination and particle levels from the process tools in the R&D fab. Based on that information, the On-Site Service Team, working with the OEM, was able to implement a number of changes to the FOUP handling process as well as the cleaning process which significantly reduced the particle levels in the FOUPs and mitigated the risk of cross contamination in the fab.