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Special Note: Some product links may direct you to our peripheral websites (devicecare.com, diskcare.com, entegrisfluidhandling.com, entegrisfuelcells.com, entegrislifesciences.com, pvprocesssolutions.com, or wafercare.com)

Planarcore® PVA Brush for Ebara®

Molded-through-the-core PVA brushes for post-CMP equipment by Ebara®

PP Core Data Sheet (603281)

PVC Core Data Sheet (1162995)

Applications Note (484906)

Designed for use with Ebara® CMP equipment, Planarcore® PVA brushes feature molded-through-the-core construction for superior performance and wafer-to-wafer cleaning consistency. While other brushes are merely friction fitted, the molded-through-the-core construction prevents PVA slippage and improves dimensional stability.

Planarcore® PVA Brushes for Ebara® with Polypropylene Core

Molded-through-the-core construction allows rapid and consistent installation on tools

Molded-through-the-core construction allows rapid and consistent installation on tools - eliminating downtime, eliminates alignment and gaping problems - increasing system throughput, and PVA remains dimenstionally stable - will not lose its concentricity during use.
High-puirty PVA provides low extractable levels and reduces particle counts on wafers
Close-molded technology enables the Planarcore brush design to equilibrate flow through the brush, eliminating the risk of nonrepeatable and nonpredictable performance due to inconsistent flow rates through the length of the brush, as seen in standard designs.

Planarcore® PVA Brushes for Ontrak® and Ebara®

200 mm and 300 mm equipment

Designed to meet the needs of next-generation copper and ILD applications
Designed with molded-through-the-core construction