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Point-of-Tool Filters

Installed on the CMP tool

Entegris’ Solaris® graded density CMP slurry filters provide point-of-use (POU) CMP applications the critical performance balance between the removal of defect-causing agglomerate gels and the delivery of the necessary slurry solution to the wafer surface. Designed for use in copper, STI, ILD and tungsten applications, the wide variety of Solaris filters capture particles in silica, ceria or alumina slurries.
Solaris® CL Depth Filters
Point-of-use (POU) CMP filter
  • Designed to meet the needs of next-generation point-of-use (POU) slurries
  • Optimized depth media with superior agglomerate and gel holding capability prolongs filter life over traditional depth filters
  • Self-venting in vertical installation ensures optimum flow characteristics
  • All-polypropylene construction with melt-blown wrapped depth filtration media
  • Optimized wrapped media provides enhanced balance of retention with filter lifetime
  • Disposable, Connectology® design enables rapid, safer installation
Solaris® CM Depth Filters
Continuous melt-blown depth media filters for removal of hard particles and gels in suspended solids
  • Unique continuous melt-blown, multi-gradient depth media provides long lasting filtration performance
  • All-polypropylene construction
  • Available in several retention ratings to match the specific needs of single pass retention and lifetime requirements
  • Self-venting in vertical installation ensures optimum flow characteristics
  • Disposable design for rapid filter changeout and less slurry waste
  • Available with Connectology® technology for fast changeout
Solaris® SCR Filters
Point-of-use (POU) CMP filter
  • Unique stacked bed media design allows precise filtration performance
  • Available as a 5” and 10” disposable filter
  • Available in 1.5 µm and 3.0 µm retention ratings
  • All-polypropylene construction with melt-blown stacked bed depth filtration media
Solaris® Filtration Manifold
For low-flow, point-of-use CMP applications
  • Self-venting filtration - Eliminates dead space and potential for slurry dry-out in the filtration media, ensuring longer life
  • More than twice the lifetime of conventional depth filters, Solaris filtration technology delivers long-lasting, easy-to-use, disposable methods of reducing defect-causing particles, gels and agglomerates while simultaneously allowing working particles to pass
  • Long-life, multi-stage filters and manifolds are designed for optimum gel removal and media specific particle and agglomerate retention in the most demanding CMP applications