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FOUPs and FOUP Cleaning Equipment

One of the world’s largest suppliers of semiconductor equipment wanted to study copper process effects on FOUP cleaning. They turned to Entegris for a partnership arrangement. Entegris’ FOUPs were integrated in the fab and managed by Entegris on-site personnel. FOUP life and interoperability are also under study.


The program takes advantage of Entegris’s extensive laboratory testing facilities to help determine contamination issues. By partnering with Entegris, this manufacturer will ultimately benefit with an increased understanding of the interaction of advanced processes and FOUP cleaning.