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In-line Teflon® Gas Filter

For all chemical resistance applications

Teflon® membrane with stainless steel housing - for all chemical resistance applications
Linegard™ Max FP
Cost-effective 0.003µm compressed air and inert gas filter for mid-flow range, noncritical applications
  • Filter element - PTFE membrane supported by polypropylene structures - provides a cost effective solution
  • Large inside diameter of filter element is designed for high flow rate/low pressure drop, resulting in up to 1000 SLPM iwth compact housing
  • Various fitting and length configurations provide ease of installation without design changes of the gas panel and delivery system
Linegard™ GIGAX-FP Filters
Cost-effective compressed air and inert gas filter for high flow range, noncritical applications
  • Filter element - Teflon® PTFE membrane supported by polypropylene structures - provides a cost-effective solution for filtraiton of compressed air and inert gases
  • Can be used up-to 3000 SLPM for high-flow applications
Wafergard® II F Micro In-line Gas Filters
Superior particulate filtration for ultrapure gas system filtration
  • PTFE membranes provide high efficiency filtration
  • Low pressure drop reduces the risk of condensation in low vapor pressure gases
  • Excellent compatibility with all classes of semiconductor process gases
  • For use with inert and reactive gases, including ozone
  • Compact footprint with a maximum diameter of 19.05 mm (0.75")
Wafergard® MAX In-line Teflon® Gas Filters
Superior particulate filtration for ultrapure gas applications
  • All Teflon® filter element provides the industry’s best performance for ultrapure applications
  • Excellent compatibility with all classes of semiconductor process gases as well as general nitrogen and CDA applications
  • Specifically designed for high flow and low delta pressure applications
  • For use with inert and reactive gases, including ozone
  • Pre-conditioned for fast startup (Silver only)
  • Select ultrahigh purity (Silver) or high purity (Bronze) surface finish
Wafergard® II F Mini XL In-line Gas Filters
Superior particulate filtration for ultrapure gas systems
  • PTFE membranes provide high-efficiency filtration
  • Low pressure drop reduces the risk of condensation in low vapor pressure gases
  • Excellent compatibility with all classes of semiconductor process gases
  • For use with inert and reactive gases, including ozone
Wafergard® II F-40 Gas Filters
Superior particulate filtration for ultrapure gas systems
  • PTFE membranes provide high efficiency filtration
  • Low pressure drop reduces the risk of condensation in low vapor pressure gases
  • Excellent compatibility with all classes of semiconductor process gases
  • For use with inert and reactive gases, including ozone
Wafergard® T-line Gas Filters
Clean, dry air for industrial applications
  • Flow rates of up to 1500 SLPM (50 SCFM)
  • Effectively retains particles of 0.003 μm size and above
  • Easy filter replacement without breaking gas line connections
  • For use in non-toxic and non-flammable inert gas
  • Available with 6-stack, 12-stack and 40-stack gas cartridge filters
Wafergard® II F-6 Gas Filters
Superior particulate filtration for ultrapure gas system filtration
  • PTFE membranes provide high efficiency filtration
  • Low pressure drop reduces the risk of condensation in low vapor pressure gases
  • Excellent compatibility with all classes of semiconductor process gases
  • For use with inert and reactive gases, including ozone