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Enkiro™ Filters

Ultrapure water filtration in semiconductor applications

Developed from the Mykrolis® contamination control technologies, Enkiro™ filters are the latest development in ultrapure water filters for today's most advanced semiconductor applications. Utilizing a surface modified ultra-high molecular weight polyethylene membrane (UPE) that is spontaneously wettable in ultrapure water, Enkiro CF provides exceptional particle retention with a 20 nm pore size rating.

Enkiro CF is available separately or as part of Entegris' LiquidLens™ ultrapure water purification system for liquid immersion lithography applications.

Enkiro CF Filters

Ultrapure water filter for immersion lithography applications

Hydrophilic, surface modified UPE membrane spontaneously wets in water, eliminating prewetting requirements
20 nm retention rating filters provide excellent small particle retention
Large membrane area delivers ultrapure water to the point-of-use rapidly and efficiently
Available in 10" and 20" cartridge lengths