Close
 
header top curve
Home   >   Products   >   Filtration   >   Liquid Filtration   >   DI Water

Products

Select one or more of the following fields in order to begin your search.
  Search by Industry   Applications or process step   Keyword or Product Name      
   and/or   and/or      Search

Special Note: Some product links may direct you to our peripheral websites (devicecare.com, diskcare.com, entegrisfluidhandling.com, wafercare.com or entegrisfuelcells.com)

DI Water

High-purity membranes for POU and bulk

Liquid filtration of DI water. Generally these materials are a standard DI water or ozonated mixtures. Entegris filters recommended for DI water applications are suitable for batch or single-wafer processes and utilize PTFE and UPE membranes for ultra purity and durability.
Protego® CF Metal Ion Purifier/Filters - SCHEDULED TO BE DISCONTINUED DECEMBER 2010
Removes metal ion contamination from ultrapure water and some organic solvents
  • Clean device design enables rapid start up and maximum system uptime
  • Easily installed or retrofitted into existing systems
  • Combination fiter and purifier eliminates the need for additional costly components
  • Available in retention ratings of 0.05 µm and 0.10 µm
  • Available in cartridge and disposable capsule designs
ProcessGard® PES Cartridge and Disposable Filters
PES filters for weak acids, bases and DI water filtration
  • Asymmetric PES structure provides longer life-time and high flow rate
  • Hydrophilic PES media eliminates prewetting treatment, reduces filter changeout time and increases equipment uptime
  • Various retention ratings, fitting sizes and types to meet various requirements
Panelgard™ 334 PES Cartridge Filter - High Flow
High-flow PES cartridge filter for flat panel display applications using weak acids/bases or DI Water
  • Hydrophilic PES membrane eliminates the need for prewetting and flushing
  • Asymmetric membrane structure provides high flow rate with lower differential pressure with longer cartridge lifetime
  • High flow and efficient particle removal - ensures rapid particle removal in one pass and circulating applications
  • Provides excellent chemical compatibility - weak acids, bases and DI Water
  • A variety of retention ratings to suit specific application needs
Panelgard® PS Cartridge Filter Family
Hydrophilic polysulfone membrane for point-of-use filtration in flat panel display and semiconductor manufacturing applications
  • Hydrophilic, polysulfone membrane
  • Asymmetric membrane structure
  • All polypropylene construction
Savana® PS Filters
Ideal for weak acids, bases and DI water applications
  • Asymmetric PS structure provides longer lifetime and high-flow rate performance
  • Hydrophilic PS media eliminates prewetting treatment, reduces filter change-out time and increases equipment uptime
  • Various retention ratings and types to meet a wide range of application requirements