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Solvents (Organic)/IPA

Ultrapure filtration for organic solvents
Organic Solvent Data Sheet (783852)
Photochemical Solvent Data Sheet (840344)

 

Liquid filtration of solvents used for dilution, rinsing and cleaning. Generally these materials are amines used at elevated temperatures. They include: IPA, solvents, solvents (amines), solvents (amine/water) and ethylene glycol. Entegris filters recommended for solvent-based applications utilize PTFE and UPE membranes for ultra purity and durability.
Fluorogard® ATE UCM 20 nm Cartridge Filter - Ultra Clean
High-volume organic solvent filter
  • High-retention rating at 20 nm improves single-pass retention efficiency improves chemical cleanliness
  • Low particle shedding improves chemical cleanliness
  • Ultra-low extractables level improves chemical cleanliness
  • Higher surface area using the ATE M pleat structure improves filter lifetime and lowers pressure drop (less stress on other components such as pumps)
  • All-fluoropolymer construction provides the best chemical compatibility in a multitude of applications
Fluorogard® ATE Filters
All-PTFE filters with broad chemical and temperature range compatibility for high flow and low cost of ownership
  • Increased yield, higher throughput through improved chemical cleanliness: retention rating down to 0.03 μm; low particle shedding; low extractable level
  • Faster bath cleanup, lower COO through higher surface area using M-pleat structure
  • Higher flow, longer lifetime, lower pressure drop (less stress on other components like pumps, etc.)
  • Available in a prewet version for quicker/easier installation with no solvent needed for prewetting and no flushing required
Microgard® Plus Cartridge Filter
Hydrophobic UPE filters with superior cleanliness for high-purity chemical and photochemical filtration
  • Low surfactant binding, excellent wettability and superior downstream cleanliness
  • Exceptional retention efficiency
  • Ultra-high membrane area, ideal for high flow with reduced pressure drop
  • Select cartridges available with special cleaning to ensure the lowest levels of organic and metal extractables
  • Ideal for high-purity chemical and photochemical filtration
Impact® Plus Filter
Point-of-Use filter for photochemicals: including photoresists and solvents
  • Ultra-high molecular weight polyethylene (UPE) membrane technology
  • Rapid filter change-out design
  • Low hold-up volume limits chemical waste
  • Designed for use with the Impact® ST manifold and IntelliGen® 2 dispense system
Impact® 2 Disposable Filters
Rapid change-out UPE membrane filters for point-of-use photochemical filtration, including photoresists and solvents
  • Optimized for use with the Impact® 2 manifold
  • Point-of-use photochemical and solvent filtration
  • Minimal chemical exposure, rapid connection design
  • Low hold-up volume minimizes chemical waste