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Solvents (Organic)/IPA

Ultrapure filtration for organic solvents

 

Liquid filtration of solvents used for dilution, rinsing and cleaning. Generally these materials are amines used at elevated temperatures. They include: IPA, solvents, solvents (amines), solvents (amine/water) and ethylene glycol. Entegris filters recommended for solvent-based applications utilize PTFE and UPE membranes for ultra purity and durability.
Fluorogard® ATE UCM 20 nm Cartridge Filter - Ultra Clean
High-volume organic solvent filter
  • High-retention rating at 20 nm improves single-pass retention efficiency improves chemical cleanliness
  • Low particle shedding improves chemical cleanliness
  • Ultra-low extractables level improves chemical cleanliness
  • Higher surface area using the ATE M pleat structure improves filter lifetime and lowers pressure drop (less stress on other components such as pumps)
  • All-fluoropolymer construction provides the best chemical compatibility in a multitude of applications
Fluorogard® ATE Filters
All-PTFE filters with broad chemical and temperature range compatibility for high flow and low cost of ownership
  • Increased yield, higher throughput through improved chemical cleanliness: retention rating down to 0.03 μm; low particle shedding; low extractable level
  • Faster bath cleanup, lower COO through higher surface area using M-pleat structure
  • Higher flow, longer lifetime, lower pressure drop (less stress on other components like pumps, etc.)
  • Available in a prewet version for quicker/easier installation with no solvent needed for prewetting and no flushing required
Microgard® Plus Cartridge Filter
Hydrophobic UPE filters with superior cleanliness for high-purity chemical and photochemical filtration
  • Low surfactant binding, excellent wettability and superior downstream cleanliness
  • Exceptional retention efficiency
  • Ultra-high membrane area, ideal for high flow with reduced pressure drop
  • Select cartridges available with special cleaning to ensure the lowest levels of organic and metal extractables
  • Ideal for high-purity chemical and photochemical filtration
Impact® Plus Filter
Point-of-Use filter for photochemicals: including photoresists and solvents
  • Ultra-high molecular weight polyethylene (UPE) membrane technology
  • Rapid filter changeout design
  • Low hold-up volume limits chemical waste
  • Designed for use with the Impact® ST manifold and IntelliGen® 2 dispense system
Impact® 2 Disposable Filters
Rapid change-out UPE membrane filters for point-of-use photochemical filtration, including photoresists and solvents
  • Optimized for use with the Impact® 2 manifold
  • Point-of-use photochemical and solvent filtration
  • Minimal chemical exposure, rapid connection design
  • Low hold-up volume minimizes chemical waste