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Base - Weak

Durable, high-purity PTFE, UPE and PES/PS membranes

Liquid filtration of weak bases. Generally these materials are used in lower concentrations, high pH and moderate temperatures (60-80°C). They include: ammonium hydroxide (NH4OH), SC1 and amines. Entegris filters recommended for weak bases use PTFE, UPE and PES/PS membranes for ultra purity and durability.
Guardian™ Plus HPM Cartridge Filters
For use in ammonium hydroxide and TMAH, copper plating solutions, low-temperature organic resist strippers (without peroxide) and similar chemistries
  • HPM cartridge filters provide nearly double the membrane area in a standard ATX style disposable filter design
  • High-flow membrane with ultra-large filtration area provides rapid particle removal and microbubble control for faster bath startup and system qualification
Guardian™ DEV Filters
Low-cost solution for KOH and TMAH based developer solution and other high pH chemical filtration applications
  • Patented hydrophilic UPE membrane spontaneously wets to enable rapid system startup
  • All polyethylene construction provides excellent chemical compatibility and long lifetime in a cost-effective device
Guardian™ ECD Cartridge Filters
Hydrophilic, high-flow inert membrane with excellent flow/retention properties, ideal solution for wet cleans and CuECD
  • Provide excellent chemical compatibility, downstream chemical cleanliness, reduced system startup times and long lifetime
  • Highly hydrophilic surfaces reduce the potential for microbubble formation
  • High-flow asymmetric membrane delivers excellent performance while minimizing system pressure drop
  • Non-interactive surfaces will not react with typical plating additives and related process chemistries – ensures ultimate process protection
Panelgard™ 334 PES Cartridge Filter - High Flow
High-flow PES cartridge filter for flat panel display applications using weak acids/bases or DI Water
  • Hydrophilic PES membrane eliminates the need for prewetting and flushing
  • Asymmetric membrane structure provides high flow rate with lower differential pressure with longer cartridge lifetime
  • High flow and efficient particle removal - ensures rapid particle removal in one pass and circulating applications
  • Provides excellent chemical compatibility - weak acids, bases and DI Water
  • A variety of retention ratings to suit specific application needs
ProcessGard® PES Cartridge and Disposable Filters
PES filters for weak acids, bases and DI water filtration
  • Asymmetric PES structure provides longer life-time and high flow rate
  • Hydrophilic PES media eliminates prewetting treatment, reduces filter changeout time and increases equipment uptime
  • Various retention ratings, fitting sizes and types to meet various requirements