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Torrento™ Filters

The new standard for nondewetting Teflon® filters

Developed from the Mykrolis® family of liquid microcontamination control technologies, Torrento™ wet etch and clean (WEC) filters provide 20 nm particle retention with ultra-high flow rate performance with a nondewetting Teflon® membrane. Optimized for leading edge recirculated bath processes, Torrento filter users can experience high yield, rapid bath cleanup cycles, extended filter life, fast changeouts and cleanliness – all in a prewet package for ease-of-use.
Torrento ATE Filters
New standard for high-flow nondewetting Teflon® filters
  • Low membrane resistance design allows 20 nm retention with high flow
  • High flow and low flux allows extended filter lifetime
  • Eliminates pre-wetting and flushing cycles
  • Excellent performance in out-gassing chemistries
  • Recommended for aqueous-based chemicals at ambient temperatures (including H2SO4, H3PO4, HNO3, HCL, NH4F, H2O2, TMAH, NH4OH and ozonated water) and elevated temperature applications (including SPM, SC1, SC2, SPM, nitride etch, metal etch and organic stripers).
  • ATE design incorporates more membrane for ultra-high flow and extended filter lifetime
  • Nondewetting membrane enables rapid filter “changeout” to maximize process uptime
  • Reduced wear and tear of wet bench pumps minimizes maintenance and replacement costs