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CMP Consumables
- Post-CMP Cleaning Brushes
- CMP Slurry Filtration
Disk Drive Handling
Dissolved Gas Solutions
- Degassification
- Regassification
- Liquid Systems
Emerging Technologies
- E-clamps
- Fuel Cells
- pHasor® X Heat Exchanger
- Degassification
- Regassification
- Liquid Systems
Filtration
- AMC Filtration
- Gas Diffuser
- Gas Filtration
- Liquid Filtration
- CMP Slurry Filtration
Fluid Handling
- High Temperature Chemical Solutions
IC Device Handling
Purification
- Gas Purification
- Liquid Purification
- AMC Filtration
Services
- Field Support Services
- Cleaning Services
- Analytical Services
- Refurbishment/Reclaim Services
Specialty Materials
- Premium Graphite & Silicon Carbide
- Specialty Coatings
Systems
- Liquid Systems
- Gas Purification Systems
Wafer/Reticle Handling

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Special Note: Some product links may direct you to our peripheral websites (devicecare.com, diskcare.com, entegrisfluidhandling.com, entegrisfuelcells.com, entegrislifesciences.com, pvprocesssolutions.com, or wafercare.com)

Machining

Machining capabilities include: 3, 4, and 5 axis milling; high speed machining; multispindle milling and drilling; turning; form, surface, centerless and double disk grinding.

Inspection capabilities include a complete suite of CMM and optical inspection equipment.

Entegris’ machining operation uses the principles of lean manufacturing to continually improve capabilities and eliminate waste in every process.

Entegris’ POCO facilities are ISO 9001:2008 and AS 9100:2004 certified.

Graphite

Entegris’ POCO graphites are unique among the many graphites available on the market. The best results require the best materials.

Silicon Carbide

Silicon carbide materials are sold as finished machines parts made to customer furnished specifications.