Close
 
header top curve
Home   >   Products   >   Systems   >   Gas Purification Systems   >   Aeronex® Gas Purification System

Products

Select one or more of the following fields in order to begin your search.
  Search by Industry   Applications or process step   Keyword or Product Name      
   and/or   and/or      Search

Special Note: Some product links may direct you to our peripheral websites (devicecare.com, diskcare.com, entegrisfluidhandling.com, entegrisfuelcells.com, entegrislifesciences.com, pvprocesssolutions.com, or wafercare.com)

Aeronex® Gas Purification Systems

Automatic regenerating gas purification systems for the removal of contaminants down to the part-per-trillion level

Entegris Aeronex® gas purification systems are stand-alone systems offering in-situ regeneration with advanced controls. The multi-bed design guarantees a continuous supply of pure gas so there is no need to send a purifier back for regeneration or to install a replacement purifier. The pre-programmed controller knows when to switch to the fresh purifier and when to regenerate the depleted purifier.

 

Aeronex gas purification systems offer maximum flow rates ranging from 120 SLM to 20,000 SLM. Applications include single-tool purification, multi-tool purification, facility purification and other applications.

 

Aeronex gas purification systems are available in an array of optional configurations to meet specific application requirements. Available options include manual or automatic bypass valves and online moisture indicators.

 

 
Aeronex® H Series Gas Purification Systems
Continuous ultrapure H2 gas at a low cost of ownership
  • Removes gaseous contaminants such as H2O, CO, CO2, O2 and nonmethane hydrocarbons to sub-ppb levels in hydrogen gas
  • Self-regenerating purifiers provide the lowest cost of ownership and eliminates environmental concerns
  • Complete automatic operation saves time, increases reliability
  • System runs at ambient temperature and is field retrofittable into existing lines with low pressure drop
  • Removes contaminants to sub-ppb (part-per-billion) and ppt (part-per-trillion) levels
  • Improves system safety by locating all purifiers in one cabinet, with multiple safety controls
  • Systems rated for up to 120 SLM, 300 SLM or 1000 SLM pure gas flow
Aeronex® I Series Gas Purification System
Continuous ultrapure N2 at a low cost of ownership
  • Removes gaseous contaminants such as H2O, CO, CO2, O2 and nonmethane hydrocarbons to sub-ppb levels in inert gases
  • Self-regenerating purifiers provide the lowest cost of ownership and eliminates environmental concerns
  • Complete automatic operation saves time, increases reliability
  • System runs at ambient temperature and is field retrofittable into existing lines with low pressure drop
  • Removes contaminants to sub-ppb (part-per-billion) and ppt (part-per-trillion) levels
  • Improves system safety by locating all purifiers in one cabinet, with multiple safety controls
  • Systems rated for up to 120 SLM, 300 SLM or 1000 SLM pure gas flow
Aeronex® SK Series Gas Purification System
Continuous ultrapure NH3 gas at a low cost of ownership
  • Removes gaseous contaminants such as H2O, CO2, and O2, to sub-ppb levels in ammonia gas
  • Self-regenerating purifiers provide the lowest cost of ownership and eliminates environmental concerns
  • Complete automatic operation saves time, increases reliability
  • System runs at ambient temperature and is field retrofittable into existing lines with low pressure drop
  • Systems rated for up to 120 SLM, or 300 SLM pure gas flow
Aeronex® Z Series Gas Purification System
Continuous ultrapure XCDA® purge gas at a low cost of ownership
  • Removes gaseous contaminants such as SO2, SOX, NOX, H2S, H2O, CO2, siloxanes, ammonia, amines, acid gasses, alcohols and non-methane hydrocarbons to sub-ppb levels in CDA (air) gas
  • Self-regenerating purifiers provide the lowest cost of ownership and eliminates environmental concerns
  • Complete automatic operation saves time, increases reliability
  • System runs at ambient temperature and is field retrofittable into existing lines with low pressure drop
  • Removes contaminants to sub-ppb (part-per-billion) and ppt (part-per-trillion) levels
  • Systems rated for up to 120 SLM, 500 SLM or 1000 SLM pure gas flow
Aeronex® Z2 Series Gas Purifiers
Continuous high-flow, point-of-use XCDA® (Extreme Clean Dry Air) purge gas at a low cost of ownership
  • Z2 media purifies to sub-ppt levels
  • Removes gaseous contaminants such as SO2, SOX, NOX, H2S, H2O, CO2, siloxanes, ammonia, amines, acid gases, alcohols and non-methane hydrocarbons to sub-ppb levels in CDA (air) gas
  • Self-regenerating purifiers provide the lowest cost of ownership and eliminates environmental concerns
  • Complete automatic operation saves time, increases reliability
  • System runs at ambient temperature and is field retrofittable into existing lines with low pressure drop
  • Systems rated for up to 5000 SLM, 10000 SLM, 15000 SLM, or 20000 SLM pure gas flow
Aeronex® HX Gas Purification System
Optimized for removal of SO2, SOx, NOx, H2S, H2O, CO2, siloxanes, ammonia, amines, acid gasses, alcohols and non-methane hydrocarbs from CDA
  • Delivers maximum molecular contamination removal and longest life before regeneration without sacrificing flow
  • Delivers ultra clean dry air with low pressure drop, requiring no change to inlet pressure
  • Provides lower energy costs of operation
  • Requires no user intervention for continuous yearly operation; delivers maximum system uptime with reduced cost of ownership
  • Designed and certified for integration into advanced production lines on a variety of lithographic and related tools. Meets or exceeds tool manufacturer specifications for lens and reticle haze protection.
  • Small footprint system with high-capacity flow support 3-4 standard scanners and up to 20 standard MOCVD reactors and similar equipment. Easy fab integration with front-access only requirements to allow maximum installation layout configuration to support full production line requirements.