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Liquid Pressure and Thermal Control Systems

Precise liquid pressure and temperature control systems

Entegris offers a wide range of pressure and temperature control systems for various applications in technically advanced industries including:

Semiconductors
Solar
Clean Energy

Our technology provides a solution that achieves a precise outlet temperature while preserving absolute fluid purity. These systems are ideal for applications demanding a very precise control of fluid stream temperature and pressure such as:

Immersion lithography scanners
Wet etch and cleaning
Photolithography

Thermal Control Systems

For more information about liquid systems please contact your Regional Representative.

LiquidLens™ LLT2 UPW Temperature Control System

UPW temperature stabilization for immersion lithography scanners

Provides stability of the Immersion scanners fluid lens by maintaining a targeted temperature of the UPW outlet stream
Ensures process and machine safely with safety alarms and leak sensors
Provides real-time monitoring of critical parameters on tool and on customers central monitoring system

Heat Exchange System

UPW temperature stabilization system

Applications in semiconductor photolithography and wet etch and clean processes
Controls liquid temperature levels within ±1ºC of a required set point
Enables efficient and clean thermal exchange
Excellent compatibility with UPW
Automatic and manual controls available
Safe for operators and the process