ニュース

25-27 October 2007
Hilton Hotel, Dresden, Germany
www.icpt2007.com

Hilton Dresden Hotel
An der Frauenkirche 5
01067 Dresden
Tel. +49-69-6308-330

Conference Hours
Thursday, 25 October, 07:30 am - 19:30 pm
Friday, 26 October, 8:30 am - 18:10 pm

Event Dates
Exhibition: 25-27 October 2007

Entegris Presentations
Session 1, Presentation - Thursday, 10:15 am, 25 October 2007
CMP Fundamentals 1 - Tribological, Kinetic, Thermal and Flow Characteristics of Retaining Rings in STI CMP

X. Wie¹, A. Philipossian^1,2, Y. Zhuang^1,2, Y. Sampurno¹, F. Sudargho^1,2, C. Wargo³, L. Borucki²

1. University of Arizona, Tuscon, AZ, USA
2. Araca Inc., Tuscon, AZ, USA
3. Entegris, Inc., Billerica, MA, USA

Session 2, Poster - Friday, 26 October 2007
Post CMP Clean PVA Brush Design Advancements and Characterization in Cu/Low-K Applications

R.K. Singh, C.R. Wargo, D.W. Stockbower
Entegris, Inc., Billerica, MA, USA